This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| CCP PECVD on FOx-22 SOG | 10/10/2014 (all day) | Request to deposit dielectric material using CCP PECVD on FOx-22 SOG. | PlasmaTherm Shuttlelock PECVD System (ccp-dep) | Approved. |
| CCP PECVD on CYTOP 809M | 10/10/2014 (all day) | Request to deposit dielectric material using CCP PECVD on CYTOP 809M SOG. | PlasmaTherm Shuttlelock PECVD System (ccp-dep) | Approved. |
| InAs on GaAs piece in Fiji2 and Savannah | 10/07/2014 (all day) | Request to process InAs deposited on GaAs in gold-contamination ALD tools (Savannah and Fiji2). |
Fiji 2 ALD (fiji2), Savannah ALD (savannah) |
Approved for documented quantities. Pieces need to cool in load lock before retrieval on Fiji2. |
| Etching Y on MoS2 substrate at wbflexcorr | 10/07/2014 (all day) | Request to etch Y at wbflexcorr. | Wet Bench Flexcorr 1 (wbflexcorr-1) | Approved for documented quantities. Re-approval required if quantities change. |
| Dichlorosilane processing on Fiji1 | 09/22/2014 (all day) | Request to use DCS precursor on Fiji1. | Fiji 1 ALD (fiji1) | Approved with modifications. Clarifications regarding DCS monitoring during processing added. |
| PS-OH use in SNF | 09/18/2014 (all day) | Request to use PS-OH polymer in SNF. | Headway Manual Resist Spinner (headway2) | Approved. |
| UV Cured adhesive use | 08/29/2014 (all day) | Request to use NOA89 or NOA75 in SNF. | Approved. | |
| Ionic Liquid on Woollam | 08/13/2014 (all day) | Request to use measure non-hazardous liquid electrolyte on Woollam. | Woollam (woollam) | Approved. Required to use a cap covered cuvette to transfer liquid across the lab. |
| PS-PMMA use in SNF | 08/12/2014 (all day) | Request to use PS-PMMA in SNF tools. | Headway Manual Resist Spinner (headway2) | Approved. |
| PGMEA use in SNF | 08/12/2014 (all day) | Request to use PGMEA in SNF tools. | Headway Manual Resist Spinner (headway2) | Approved. |