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Stanford Nanofabrication Facility
Lab User Guide

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Useful Links

  • Run NEMO (login required)
  • NEMO User Guide
  • External Links
  • Wafer Dopant and Resistivity Specs
  • Face shield cleaning using steamer
  • Tool Monitoring

Tool Monitoring

The Tool Monitoring is run with the help of our interns from community colleges.

Click here to find out more about the Community College Internship program.

Here is a list of tools we currently monitor:

Dry etchers:

HDPCVD

Oxford-RIE

Pt-Ox

Samco

 

Reflectometry, nanospec2 and nanospec3

 

Mask Aligner Direct Write Heidelberg

Mask Aligner Direct Write Heidelberg2

Resist Coat svgtrack

Resist Coat svgtrack2

Last modified: 28 May 2025
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