Chemical Formula:
GaN
Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Technique | Cleanliness | Primary Materials Etched | Other Materials Etched | Developer | Chemicals | Gases | Substrate Size | Substrate Type | Maximum Load |
|---|---|---|---|---|---|---|---|---|---|---|
|
Wet Bench Flexcorr 1 wbflexcorr-1 |
|
Flexible | ||||||||
|
Wet Bench Flexcorr 2 wbflexcorr-2 |
Flexible | |||||||||
|
Wet Bench Flexcorr 3 wbflexcorr-3 |
Flexible | |||||||||
|
Wet Bench Flexible Solvents wbflexsolv |
Flexible | |||||||||
|
Wet Bench Flexible Solvents 1 wbflexsolv-1 |
Flexible | |||||||||
|
Wet Bench Flexible Solvents 2 wbflexsolv-2 |
Flexible | |||||||||
|
Wet Bench Miscellaneous wbmiscres |
Flexible | |||||||||
|
Wet Bench Solvent Lithography lithosolv |
Flexible | |||||||||
|
Woollam woollam |
"All" | 1 | ||||||||
|
Xactix Xenon Difluoride Etcher xactix |
"All" | 1 |