This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Bring in and Store negative e-beam resists ma-N 2403, AR-N 7520 | 11/25/2019 (all day) | Request for new ebeam resists to be used in the Laurell only. | Request approved. Please see process staff for details. | |
| AZ n LoF2020 in SNF headway | 11/20/2019 (all day) | Request for new photoresist to be used in Headway. |
Headway Manual Resist Spinner (headway2), Karl Suss MA-6 Contact Aligner (karlsuss), Wet Bench Miscellaneous (wbmiscres) |
Approved. |
| Use of Stycast Epoxy for Non-galvanic Flip-chip Bonding | 11/15/2019 (all day) | Documentation of procedure to use epoxy in flip-chip bonder. | Wet Bench Miscellaneous (wbmiscres) | Approved. |
| Introduction of Ni into Intlvac ebeam evaporator | 11/15/2019 (all day) | Request to add new metal to clean/semiclean evaporator. | Intlvac Evaporator (Intlvac_evap) | Request approved. Please see process staff for details. |
| Use of InP substrate in Fiji1 | 11/15/2019 (all day) | Request documenting procedures to use InP substrate in Fiji1 (semiclean) | Fiji 1 ALD (fiji1) | Request approved. Please see process staff for details. |
| Use of Parylene N in parcoater | 11/11/2019 (all day) | Request to use alternate Parylene type | PDS 2010 LABCOTER™ 2 Parylene Deposition System (parcoater) | Approved. |
| NOA89 use in SNF litho area | 11/07/2019 (all day) | Request to bring new chemistry into SNF litho area |
Karl Suss MA-6 Contact Aligner (karlsuss), Headway Manual Resist Spinner (headway2) |
Approved. |
| Request to bring in baked KrF resist into ExFab | 10/24/2019 (all day) | Request to bring new materials into ExFab. | Request approved. Please see process staff for details. | |
| Request to use EKC 265 in SNF | 10/10/2019 (all day) | Documented protocol for using EKC265 in SNF. | Approved. | |
| Request to use TechniEtch CR01 in SNF | 10/10/2019 (all day) | Request to use perchloric acid containing chemistry in SNF. | Request approved. Please see process staff for details. |