This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Request to use SU-8 | 01/15/2020 (all day) | Request to bring in SU-8 (not stocked by SNF). | Request approved. Please see process staff for details. | |
| Negative Resist AZ nLOF2035 in SNF | 01/09/2020 (all day) | Request to bring new resist in to SNF. | Request approved. Please see process staff for details. | |
| AlCuZr target for Lesker | 01/07/2020 (all day) | Request to bring new target in to use in Lesker. | Lesker Sputter (lesker-sputter) | Approved. |
| Depositions on V-VI Materials in Fiji3 | 01/06/2020 (all day) | Request to use non-standard materials in Fiji3. |
Fiji 3 ALD (fiji3), Micromanipulator6000 IV-CV probe station (micromanipulator6000), Lakeshore Hall Measurement System (LakeshoreHall) |
Request withdrawn due to shift in project focus. Archived here for potential future re-engagement. |
| Bring in and Store negative e-beam resist developer AR300-46 | 12/20/2019 (all day) | Request for developer to be used and stored in SNF. | Request approved. Please see process staff for details. | |
| Wet Etch of BTO Thin Film Using DHF | 12/17/2019 (all day) | Wet etch of unique film in SNF. | Request approved. Please see process staff for details. | |
| Sugar layer processing. | 12/12/2019 (all day) | Spin coat and baked in other lab, brought into SNF for measurement. | Request approved. Please see process staff for details. | |
| Annealing of 1cm2 GaAs chip at 400C and 450C in RTA | 12/10/2019 (all day) | Request to anneal GaAs in RTA. Similar to Xue Bai's original request. Documenting for As gas safety purposes. | RTA AllWin 610 (aw610_l) | Approved. |
| Request to expose pre-coated S1813 resist in SNF | 12/05/2019 (all day) | Request to expose glass slides with S1813 resist in Karl Suss and develop in SNF. | Request approved. Please see process staff for details. | |
| Bring in_Store negative e-beam resists ma-N 2403, AR-N 7520 | 11/25/2019 (all day) | Request for new ebeam resists to be used in the Laurell only. |