Processing Technique Equipment name & NEMO ID Cleanliness Substrate Size Maximum Load (number of wafers) Developer Notes Stylus Tip Radius
Resist Develop (automatic) SVG Develop Track 1
svgdev 		"All"
25 4 inch wafers

Automatic development.
Resist Develop (automatic) SVG Develop Track 2
svgdev2 		"All"
25 4 inch wafers

Automatic development.