MF26A is a resist developer that is a chemical blend that, amongst other chemicals, contains surfactant and 2.4% TMAH.
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Chemicals | Notes |
|---|---|---|---|---|---|
|
Ex Fab Develop Wet Bench wbexfab_dev |
WbExfab_Dev Training 1.00 hours |
SNF Exfab Paul G Allen L104 Stinson |
|
Manual development of resist in beakers. SNF approved developers only. No solvents! |
|
|
SVG Develop Track 1 svgdev |
SVG Resist Develop tracks 1 and 2 Training 0.50 hours |
SNF Paul G Allen L107 Cleanroom |
|
Automatic development. |
|
|
SVG Develop Track 2 svgdev2 |
SVG Resist Develop tracks 1 and 2 Training 0.50 hours |
SNF Paul G Allen L107 Cleanroom |
|
Automatic development. |