This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Proprietary resist use in SNF | 04/20/2021 (all day) | Request to use proprietary formulation in SNF litho tools. | Request approved. Please see process staff for details. | |
| Use of Photoresist MIR701 in SNF | 04/20/2021 (all day) | Request to bring new resist in to SNF. | Request approved. Please see process staff for details. | |
| Absorption Spectroscopy of Y-27632 | 04/16/2021 (all day) | Request to bring wet chemicals into Ocean (151) | Jasco UV-Vis-NIR (jasco-uv-vis-nir) | Request approved. |
| Request to use SOG in SNF | 04/08/2021 (all day) | Process flow documentation for SOG in SNF | Headway Manual Resist Spinner (headway2) | Request approved. |
| Block copolymer etch in lampoly | 04/07/2021 (all day) | Non-standard material etch in clean tool in SNF | Lam Research TCP 9400 Poly Etcher (lampoly) | Request approved. |
| Use of Toluene in Sylgard 184 at PDMS Workbench | 04/01/2021 (all day) | Non-standard PDMS processing in Mavericks | PDMS Workbench () | Request approved. |
| Use of BCB on Heidelberg | 03/25/2021 (all day) | Request to bring in new chemistries for use on Heidelberg. | Heidelberg MLA 150 (heidelberg) | Request approved. Please see process staff for details. |
| Bonder test with pressure testing paper | 03/22/2021 (all day) | Request to bring new materials into evbonder | Request approved. | |
| Centriguation of CNT Solution | 03/16/2021 (all day) | Request to process CNT in solution in Mavericks | Fisher Accuspin 24C (centrifuge) | Request approved. |
| PMMA (950K and 495K) for 155 Glovebox Spincoating | 03/15/2021 (all day) | Chemical request and SOP for Mavericks glovebox. | Glovebox-l (glovebox-l) | Request approved. |