PROM Request Title:
Block copolymer etch in lampoly
PROM Request Summary:
Non-standard material etch in clean tool in SNF
PROM Date:
04/07/2021 (all day)
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
Materials All:
Polymer
Polymer (Various polymers)
Various polymers
Various polymers