Overview
Lesker3 is a load locked multi wafer sputter deposition tool providing flexible processing operations for superconducting materials. The six gun magnetron Lesker3 is classified as a flexible sputtering tool for specific restriction for compatibility with superconducting thin films for quantum research.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Substrate Sizes
Maximum Load:
three 4-inch wafers or one 6 inch
Lab Organization, Location, and NEMO Information
Lab Organization:
Location:
NEMO Area:
NEMO ID:
lesker3-sputter
Training and Maintenance
Lab Facility:
Training Charges:
1.00 hours
Primary Trainer:
Backup Trainer(s):
Primary Maintenance:
Backup Maintenance:
Steps to become a tool user
Become a member of nano@stanford.
Become a member of SNF.
- Study the relevant operating procedures: