PROM Request Title: 
Silicon etching in existing SPTS uetch vapor etcher
PROM Request Summary: 
Request to modify uetcher equipment to enable si etching.
PROM Date: 
10/06/2021 (all day)
PROM Decision: 
Request rejected due to equipment incompatibility with proposed process.
Link to PROM Request and supporting documentation: 
Silicon etching in existing SPTS uetch vapor etcher