Skip to main content

Stanford University

Stanford Nanofabrication Facility

Lab User Guide

MenuToggle menu visibility

nano@stanford Home
Guide Home
Techniques and Projects
Safety & Policies
Training
Materials
Useful Links
Emergency and People
Equipment

Processing Techniques (Function and Method(s))

Processing Techniques (Function and Method(s)):

Plasma Enhanced (PE) ALD

Equipment Used

Fiji 1 ALD (fiji1)

Fiji 2 ALD (fiji2)

ALD TiN- Final Presentation

ALD TiN- Final Presentation

PDF File: ALD TiN- Final Presentation

Materials

Titanium NItride

Stanford
University

Stanford Home (link is external)
Maps & Directions (link is external)
Search Stanford (link is external)
Emergency Info (link is external)

Terms of Use (link is external)
Privacy (link is external)
Copyright (link is external)
Trademarks (link is external)
Non-Discrimination (link is external)
Accessibility (link is external)

© Stanford University. Stanford, California 94305.