Short Name:
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Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
|---|---|---|---|---|
|
Ex Fab Develop Wet Bench wbexfab_dev |
WbExfab_Dev Training | Flexible | SNF Exfab Paul G Allen L104 Stinson |
Manual development of resist in beakers. SNF approved developers only. No solvents! |
|
Ex Fab Solvent Wet Bench wbexfab_solv |
WbExfab_Solv Training | Flexible | SNF Exfab Paul G Allen L104 Stinson | |
|
Malvern Dynamic Light Scattering (DLS) Zetasizer malvern-dls |
Malvern Dynamic Light Scattering (DLS) Zetasizer Training | Flexible | SNF Exfab Paul G Allen 155 Mavericks | |
|
PDS 2010 LABCOTER™ 2 Parylene Deposition System parcoater |
Parylene Coater Training | Flexible | SNF Exfab Paul G Allen 155 Mavericks | |
|
Samco PC300 Plasma Etch System samco |
Samco Training | Flexible | SNF Paul G Allen L107 Cleanroom |