PROM Request Title: 
Post wafer dicing pieces in lampoly
PROM Request Summary: 
Request to take pieces post wafer dicing (gold) into lampoly (clean).
PROM Date: 
08/13/2015 (all day)
PROM Decision: 
Request approved only when resist is present during dicing to prevent massive amounts of particles.
Link to PROM Request and supporting documentation: 
Post wafer dicing pieces in lampoly
Equipment List: 
Lam Research TCP 9400 Poly Etcher (lampoly)