PROM Request Title: 
Li2CO3 ALD
PROM Request Summary: 
Request to perform ALD of Li2CO3 in Savannah. Request requires new precursors, equipment modification, and significant handling procedural changes to address safety issues.
PROM Date: 
02/28/2014 (all day)
PROM Decision: 
Conditional Approval. Process is approved as documented. Equipment modifications will need to be documented and reviewed by PROM Committee.
Link to PROM Request and supporting documentation: 
Li2CO3 ALD
Equipment List: 
Savannah ALD (savannah)