EIM-TFSI/p(VDF-HFP) Ion gel processing

PROM Request Title:

EIM-TFSI/p(VDF-HFP) Ion gel processing

PROM Request Summary:

Introduction of new gel material (made elsewhere) into SNF process equipment for patterning and deposition.

PROM Date:

04/11/2019 (all day)

PROM Decision:

Approved.

Link to PROM Request and supporting documentation:

EIM-TFSI/p(VDF-HFP) Ion gel processing

Equipment List:

AJA Evaporator (aja-evap)

SVG Resist Coat Track 1 (svgcoat)

Heidelberg MLA 150 (heidelberg)

SVG Develop Track 1 (svgdev)

MRC Reactive Ion Etcher (mrc)

Matrix Plasma Resist Strip (matrix)

Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)