PROM Request Title: 
Classifying Fiji1 as a clean tool
PROM Request Summary: 
Procedure proposed to allow Fiji1 to be used as a clean tool. Data collection required. Collected data showed this procedure is not sufficient to remove contamination risk to epi.
PROM Date: 
12/14/2016 (all day)
PROM Decision: 
Data collection approved. Results demonstrated that procedure is not sufficient to remove contamination risk.
Link to PROM Request and supporting documentation: 
Classifying Fiji1 as a clean tool
Equipment List: 
AMAT Centurion Epitaxial System (epi2)
SPTS uetch vapor etch (uetch)
Fiji 1 ALD (fiji1)