Bring in, store, and process Si wafers from Rogue Valley Microdevices

PROM Request Title:

Bring in, store, and process Si wafers from Rogue Valley Microdevices

PROM Request Summary:

Request to bring in wafers from a new vendor.

PROM Date:

02/05/2020 (all day)

PROM Decision:

Requestor developed process flow with no clean equipment required so PROM approval not needed. Requst is archived for future reference.

Link to PROM Request and supporting documentation:

Bring in, store, and process Si wafers from Rogue Valley Microdevices

Equipment List:

Wet Bench Flexible Solvents (wbflexsolv)

Wet Bench Flexcorr 1 (wbflexcorr-1)

Wet Bench Clean_res-piranha (wbclean_res-piranha)

HMDS Vapor Prime Oven, YES (yes)

SVG Develop Track 1 (svgdev)

SVG Resist Coat Track 1 (svgcoat)

Karl Suss MA-6 Contact Aligner (karlsuss)

Heidelberg MLA 150 (heidelberg)

AJA Evaporator (aja-evap)

Oxford Dielectric Etcher (oxford-rie)

Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)