Project Type:
E241
Date:
June 2014 (all day)
Areas of Interest:
Hydrophilic (ODS) and Hydrophobic (DETA) SAMS deposition on Pyrex and Si, uniformity and film quality
Processing Technique (former Function and Method):
Researchers and (Mentors):
Felix Alfonso, Hsin-Ya Lou, (Michelle Rincon), (J Provine)
List of Important Equipment: