Project Type: 
E241
Date: 
December 2014 (all day)
Areas of Interest: 
PMDA, ODA
Report: 
ALD Precursor Delivery & Debugging: A Case Study in Polymer Development- Final Report
Processing Technique (former Function and Method): 
Atomic Layer Deposition (ALD)
Researchers and (Mentors): 
Felix Alfonso, Tim English, (Michelle Rincon), (J Provine)
List of Important Equipment: 
MVD (mvd)
Savannah ALD (savannah)
Presentation: 
ALD Precursor Delivery & Debugging: A Case Study in Polymer Development- Final Presentation