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Lab User Guide

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Emergency and People

  • For Emergencies
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Lavendra Mandyam

Contact Information

Phone: 
(650)498-1304
Office location (building & room #): 
Paul G. Allen 145
Email: 
lavendra@stanford.edu

About

Title: 
Senior Process Engineer - Dry Etching
Liaison Specialties: 
Etching
MEMS
Plasma deposition

Trainer for

Gasonics Aura Asher (gasonics)
Lam Research TCP 9400 Poly Etcher (lampoly)
Matrix Plasma Resist Strip (matrix)
MRC Reactive Ion Etcher (mrc)
Oxford Dielectric Etcher (oxford-rie)
Oxford III-V etcher (Ox-35)
Oxford Plasma Pro ICP-RIE (Ox-gen)
Oxford Plasma Pro ICP-RIE ALE (Ox-ALE)
Oxford Plasma Pro ICP-RIE Ox (Ox-Ox)
Oxford Plasma Pro PECVD (Ox-PECVD)
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
Plasmaetch PE-50 (plasma-etch)
PlasmaTherm Shuttlelock PECVD System (ccp-dep)
PlasmaTherm Versaline HDP CVD System (hdpcvd)
Samco PC300 Plasma Etch System (samco)
Technics Asher (technics)
Xactix Xenon Difluoride Etcher (xactix)

Backup trainer for

SEM -Zeiss Merlin (sem-merlin)
SPTS uetch vapor etch (uetch)

Backup maintenance for

Oxford Plasma Pro ICP-RIE (Ox-gen)
Oxford Plasma Pro ICP-RIE ALE (Ox-ALE)
Oxford Plasma Pro ICP-RIE Ox (Ox-Ox)
Oxford Plasma Pro PECVD (Ox-PECVD)
SPTS uetch vapor etch (uetch)
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