Optimization of Silicon Isotropic Plasma Etch in PTDSE for GOPHER Process- Final Report PDF File: Optimization of Silicon Isotropic Plasma Etch in PTDSE for GOPHER Process- Final Report This should be displaying Optimization of Silicon Isotropic Plasma Etch in PTDSE for GOPHER Process- Final Report inline. If it's not, look to see if your browser is set to automatically download pdf files.