Development of Thin Film Release of GaN using AlN and AlGaN Buffer layers for MEMs Applications- Final Presentation PDF File: Development of Thin Film Release of GaN using AlN and AlGaN Buffer layers for MEMs Applications- Final Presentation This should be displaying Development of Thin Film Release of GaN using AlN and AlGaN Buffer layers for MEMs Applications- Final Presentation inline. If it's not, look to see if your browser is set to automatically download pdf files. Materials Aluminum Nitride Gallium Nitride Aluminum Gallium Nitride