Skip to main content
Stanford University
Home
Stanford Nanofabrication Facility
Lab User Guide

  • nano@stanford Home
  • Guide Home
    • Guide Home Overview
    • Lab Spaces
    • Visit
      • Lab Attire
    • How to Join
    • Contacts and Emergency
    • Rates
    • Storage
    • History
  • Techniques and Projects
    • Overview
    • Processing Techniques
    • Projects
      • Fab Project Courses: E241 & EE412
      • Community Service Projects
      • nano@stanford Fellowship Projects
    • Nano Nuggets
    • Processes
      • Device Process Courses: EE410 and EE312
    • Runsheets
  • Safety & Policies
    • Overview
    • SNF Lab Manual, link to google doc
    • SNF Lab Manual
    • Safety Training
    • SDS
    • Gowning lab specific
    • Garment checkout for Cleanroom L107
    • Gowning Procedure for Cleanroom L107
    • Mavericks (ExFab Room 155) Policies
    • Prescription Safety Glasses
  • Training
    • Overview/Equipment List
    • Training Course Online
    • Upcoming Training, link to NEMO
    • Training Shadowing Form
    • Training Videos
    • All Litho class
  • Materials
    • Overview
      • Chemicals & Materials
    • Cleanliness Groups
      • "All" List of Tools
      • "Clean" List of Tools
        • "Clean-Ge" List of Tools
        • "Clean (MOCVD)" List of Tools
        • "Semiclean" List of Tools
      • "Flexible" List of Tools
    • New Process or Material Requests (PROM)
      • ProM Committee
      • ProM Approach
      • TMAH Protocols
        • TMAH Checklist
      • PROM (PRocess and Materials) Form
      • PROM archive view
    • Chemicals List
      • Acids
      • Bases
      • Developers
      • Metal Etchants
      • Other Chemicals
      • Primer
      • Resists
      • Solvents
    • Substrate Types and Sizes
    • Materials List
    • Gases List
  • Useful Links
    • Run NEMO (login required)
    • NEMO User Guide
    • External Links
    • Wafer Dopant and Resistivity Specs
    • Face shield cleaning using steamer
    • Tool Monitoring
  • Emergency and People
    • For Emergencies
    • Staff List
    • Consultants
    • Process Staff Liaisons
  • Equipment
    • Equipment Name Table
    • Characterization
    • CVD
    • Doping
    • Dry Etch
    • Metallization
    • Oxidation and Annealing
    • Photolithography
    • Wet Chemical Processing

Equipment Used

Headway Manual Resist Spinner (headway2)

Standard Operating Procedure for Headway

Source: 
Standard Operating Procedure for Headway (click on this if the formatting is funky)
Trouble with permissions to access the document below? Email the SNF Web Crew with the URL of this page & the document name!

Standard Operating Procedure for Headway

Stanford
University
  • Stanford Home (link is external)
  • Maps & Directions (link is external)
  • Search Stanford (link is external)
  • Emergency Info (link is external)
  • Terms of Use (link is external)
  • Privacy (link is external)
  • Copyright (link is external)
  • Trademarks (link is external)
  • Non-Discrimination (link is external)
  • Accessibility (link is external)
© Stanford University.   Stanford, California 94305.