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Stanford Nanofabrication Facility

Lab User Guide

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Equipment Used

Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)

Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)

Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)

PlasmaTherm Versaline HDP CVD System (hdpcvd)

PT-MTL Plasma Therm Training Video

SNF Plasma Therm Operations

Video describing operations for the SNF PT-MTL. The other Plasma Therm equipment is similar.

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