Skip to main content
Stanford University
Stanford Nanofabrication Facility
Lab User Guide
Menu
Toggle menu visibility
nano@stanford Home
Guide Home
Guide Home Overview
Lab Spaces
Visit
Lab Attire
How to Join
Contacts and Emergency
Rates
Storage
History
Techniques and Projects
Overview
Processing Techniques
Projects
Fab Project Courses: E241 & EE412
Community Service Projects
nano@stanford Fellowship Projects
Nano Nuggets
Processes
Device Process Courses: EE410 and EE312
Runsheets
Safety & Policies
Overview
SNF Lab Manual, link to google doc
SNF Lab Manual
Safety Training
SDS
Gowning lab specific
Garment checkout for Cleanroom L107
Gowning Procedure for Cleanroom L107
Mavericks (ExFab Room 155) Policies
Prescription Safety Glasses
Training
Overview/Equipment List
Training Course Online
Upcoming Training, link to NEMO
Training Shadowing Form
Training Videos
All Litho class
Materials
Overview
Chemicals & Materials
Cleanliness Groups
"All" List of Tools
"Clean" List of Tools
"Clean-Ge" List of Tools
"Clean (MOCVD)" List of Tools
"Semiclean" List of Tools
"Flexible" List of Tools
New Process or Material Requests (PROM)
ProM Committee
ProM Approach
TMAH Protocols
TMAH Checklist
PROM (PRocess and Materials) Form
PROM archive view
Chemicals List
Acids
Bases
Developers
Metal Etchants
Other Chemicals
Primer
Resists
Solvents
Substrate Types and Sizes
Materials List
Gases List
Useful Links
Run NEMO (login required)
NEMO User Guide
External Links
Wafer Dopant and Resistivity Specs
Face shield cleaning using steamer
Tool Monitoring
Emergency and People
For Emergencies
Staff List
Consultants
Process Staff Liaisons
Equipment
Equipment Name Table
Characterization
CVD
Doping
Dry Etch
Metallization
Oxidation and Annealing
Photolithography
Wet Chemical Processing
Equipment Used
Lam Research TCP 9400 Poly Etcher (lampoly)
Lampoly Video Etcher Setup
SNF Lampoly Etcher Setup
Video showing how to set up an etch on the Lampoly.
