| Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
|---|---|---|---|---|
|
CHA Solutions II Evaporator cha-evap |
Evaporator CHA Training | Flexible | SNF Paul G Allen L107 Cleanroom |
For more than 300nm deposition, please contact Neel Mehta <nmehta26@stanford.edu> in advance |
|
Intlvac Evaporator Intlvac_evap |
Evaporator Intlvac Training | Clean, Semiclean | SNF Paul G Allen L107 Cleanroom |