AMAT Centurion Epitaxial System
epi2 |
Epitaxial AMAT Centurion Training |
Clean |
SNF Paul G Allen L107 Cleanroom |
N and P doping available- intrinsic to 5E19 Operating pressure range is 5-300Torr |
Oxford Plasma Pro PECVD
Ox-PECVD |
Oxford Plasma Pro PECVD Training |
Semiclean, Flexible |
SNF Paul G Allen L107 Cleanroom |
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PlasmaTherm Shuttlelock PECVD System
ccp-dep |
PlasmaTherm Shuttlelock PECVD System Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
To maintain cleanliness level, cleans of both the chamber and wafers are required prior to processing -
Substrates in clean category: Pre-Diffusion Clean
For semi-clean substrates: Standard Metal Clean (SRS100 + PRS1000) . Run Chamber clean (no dummies) and conditioning with clean dummies prior to run |
PlasmaTherm Versaline HDP CVD System
hdpcvd |
PlasmaTherm Versaline HDP CVD System Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
To maintain cleanliness level there are cleans required for both the chamber and wafers prior to processing -
Substrates in clean category: Pre-Diffusion Clean
For semi-clean substrates: Standard Metal Clean (SRS100 + PRS1000) . Run Chamber clean (no dummies) and conditioning with clean dummies prior to run |
Tystar Bank 1 Tube 3 Poly
B1T3 Flexible Poly |
Tystar LPCVD Tube Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
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Tystar Bank 1 Tube 4 LTO
B1T4 Flexible LTO |
Tystar LPCVD Tube Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
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Tystar Bank 2 Tube 7 Nitride
B2T7 Flexible Nitride |
Tystar LPCVD Tube Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
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Tystar Bank 2 Tube 8 LTO
B2T8 Clean LTO |
Tystar LPCVD Tube Training |
Clean |
SNF Paul G Allen L107 Cleanroom |
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Tystar Bank 3 Tube 10 Nitride
B3T10 Clean Nitride |
Tystar LPCVD Tube Training |
Clean |
SNF Paul G Allen L107 Cleanroom |
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Tystar Bank 3 Tube 11 TEOS
B3T11 Clean TEOS |
Tystar LPCVD Tube Training |
Clean |
SNF Paul G Allen L107 Cleanroom |
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Tystar Bank 3 Tube 12 Poly
B3T12 Clean Poly |
Tystar LPCVD Tube Training |
Clean |
SNF Paul G Allen L107 Cleanroom |
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